CMUTs-based fluorescence-quality dual-response gas detection sensor, system and method

The invention belongs to the technical field of MEMS gas sensors, and discloses a CMUTs-based fluorescence-quality dual-response gas detection sensor, system and method, the sensor comprises CMUTs, the CMUTs are provided with a vibration film and a cavity, the surface of the vibration film is provided with a sensitive layer used for detecting target trace gas, and the sensitive layer can cause fluorescence intensity change. According to the invention, the characteristic frequency change of the CMUTs can be caused by the mass change of the sensitive layer attached with the gas, so that the impedance/phase-frequency curve of the CMUTs deviates, and the mass or concentration of the adsorbed target gas can be detected according to the characterization. The sensitive layer can cause the fluorescence intensity change, the pulse fluorescence is utilized to excite the optical fiber, the fluorescence intensity change after energy transfer can be generated, and the gas type and concentration are detected through the fl