Method for manufacturing processed article, method for manufacturing semiconductor device, and apparatus for manufacturing processed article

The method for manufacturing a processed article includes: a preparation step of preparing an object to be processed (1) including at least a lead frame in which a groove portion (5) is formed in advance along a position to be cut; a surface layer removal step for partially removing a surface layer...

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Bibliographische Detailangaben
Hauptverfasser: HANASAKA SHUHO, ISHIBASHI KANJI, TAKAMORI YUDAI, FUJIWARA NAOMI, NAKAMURA KEIICHI
Format: Patent
Sprache:chi ; eng
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