Chip pollutant detection device and detection method

The invention discloses a chip pollutant detection device and a detection method, and belongs to the technical field of chip appearance detection. In order to solve the problem that pollutants on the inner surface and pollutants on the outer surface of a CMOS chip are difficult to distinguish in the prior art, two camera assemblies in the chip pollutant detection device are used for shooting a to-be-detected CMOS chip at the same time to obtain to-be-detected CMOS images at two different positions; a reference surface key point world coordinate and a pollutant key point world coordinate are obtained through a reference surface key point image pixel coordinate and a pollutant key point image pixel coordinate in a CMOS image to be detected, the reference surface key point world coordinate is fitted into a plane, and the distance from the pollutant key point world coordinate to the plane is calculated. And whether the pollutants are the inner surface pollutants or the outer surface pollutants is judged, so that