Scratch tester axial force fluctuation suppression method based on piezoelectric driving compensation module

The invention provides a scratch tester axial force fluctuation suppression method based on a piezoelectric driving compensation module. The scratch tester axial force fluctuation suppression method comprises the steps that the piezoelectric driving compensation module is integrated in a z-axis moto...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HUANG HU, LIU TONG, AN HONG, HE GUIHAO, WU HAOXIANG, NI YONGCHUN, WANG BO
Format: Patent
Sprache:chi ; eng
Schlagworte:
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