TiO-based diluted magnetic semiconductor film with room-temperature ferromagnetism and preparation method and application thereof

The invention relates to a TiO-based diluted magnetic semiconductor film with room-temperature ferromagnetism and a preparation method and application thereof, and belongs to the technical field of semiconductor film materials. According to the TiO-based diluted magnetic semiconductor film with the room-temperature ferromagnetism, the TiO-based diluted magnetic semiconductor film with the room-temperature ferromagnetism is prepared by taking transition metal ions as donor doping, taking a ceramic target material as a basis and adopting a laser pulse deposition technology; the chemical components of the semiconductor film conform to the chemical general formula Ti < 1-x > M < x > O < 2 >, M is a transition metal and is selected from VIIB and VIII groups, and x is greater than 0 and less than or equal to 0.1; and the heating temperature of the substrate material, the power of the laser, the oxygen partial pressure and other parameters are controlled, the spin injection efficiency between the metal and the semic