Full-passivation back contact TBC solar cell structure and preparation method thereof
The invention relates to the technical field of solar power generation, in particular to a full-passivation back contact TBC solar cell structure and a preparation method thereof, and the method comprises the following steps: S1, carrying out the double-side polishing of a silicon wafer; s2, a first...
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| creator | PAN JIAYAN SHANGGUAN QUANYUAN LIU QIYAO |
| description | The invention relates to the technical field of solar power generation, in particular to a full-passivation back contact TBC solar cell structure and a preparation method thereof, and the method comprises the following steps: S1, carrying out the double-side polishing of a silicon wafer; s2, a first tunneling SiO2 layer is prepared through oxidation, a layer of boron-doped amorphous silicon is deposited to form a P + poly layer, a patterned laser SiO2 mask is formed, and alkali washing is carried out; s3, a second tunneling SiO2 layer is prepared through oxidation, a layer of phosphorus-doped amorphous silicon is deposited to form a back N + poly layer, and a patterned laser SiO2 mask is formed; s4, forming a pyramid suede; s5, depositing a layer of phosphorus-doped amorphous silicon to form a front N + poly layer; s6, the silicon wafer is placed in a high-temperature annealing furnace tube, an N + front passivation field is formed on the light receiving face of the front face of the silicon wafer, and a P + |
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| subjects | BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Full-passivation back contact TBC solar cell structure and preparation method thereof |
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