Particle beam microscope

A particle beam microscope comprises an electron beam source (5), a beam tube (7), a magnetic objective having two magnetic pole ends (46, 47), an object holder, a scintillator (59) arranged between a lower end (27) of the beam tube (7) and an object (3), a ring electrode (55) arranged between the scintillator (59) and the object (3); and a potential supply system (14) that feeds a potential (U1) to the object holder (4), a potential (U2) to the ring electrode (55), a potential (U3) to the scintillator (59), and a potential (U4) to the electrically conductive inside surface of the beam tube (7). Herein, the following formula is applicable: U4gt; u1, U3gt; u1, U2gt; u1 and U2gt; u3. 一种粒子束显微镜，包括：电子束源(5)、束管(7)、具有两个磁极端(46、47)的磁性物镜、物体固持器、布置在束管(7)的下端(27)与物体(3)之间的闪烁体(59)、布置在闪烁体(59)与物体(3)之间的环形电极(55)；以及电位供应系统(14)，该电位供应系统将电位(U1)馈送到物体固持器(4)、将电位(U2)馈送到环形电极(55)、将电位(U3)馈送到闪烁体(59)以及将电位(U4)馈送到束管(7)的导电内侧表面。在本文中，下式适用：U4>U1、U3>U1、U2>U1并且U2>U3。