Feeding frame for batch annealing of silicon carbide wafers and annealing furnace tube

The invention discloses a feeding frame for batch annealing of silicon carbide wafers and an annealing furnace tube. The feeding frame comprises a bearing frame installed on a top plate of a movable frame and a blocking and buffering unit installed on the bearing frame. A plurality of limiting rod s...

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Hauptverfasser: YIN XUEYUAN, CHEN HUI
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creator YIN XUEYUAN
CHEN HUI
description The invention discloses a feeding frame for batch annealing of silicon carbide wafers and an annealing furnace tube. The feeding frame comprises a bearing frame installed on a top plate of a movable frame and a blocking and buffering unit installed on the bearing frame. A plurality of limiting rod sets are linearly arranged on the bearing frame at equal intervals, each limiting rod set comprises two limiting rods which are oppositely arranged at intervals, a supporting bottom plate is obliquely arranged below the multiple limiting rod sets, and the front end of the supporting bottom plate is rotationally connected with the upper end of the moving frame; the rear end of the supporting bottom plate penetrates through a movable opening formed in the bearing frame, and an upper blocking column and a lower blocking column are arranged on the inner cavity wall of the movable opening of the bearing frame up and down. The feeding frame is matched with an annealing furnace tube for use, so that an operator can conveni
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The feeding frame comprises a bearing frame installed on a top plate of a movable frame and a blocking and buffering unit installed on the bearing frame. A plurality of limiting rod sets are linearly arranged on the bearing frame at equal intervals, each limiting rod set comprises two limiting rods which are oppositely arranged at intervals, a supporting bottom plate is obliquely arranged below the multiple limiting rod sets, and the front end of the supporting bottom plate is rotationally connected with the upper end of the moving frame; the rear end of the supporting bottom plate penetrates through a movable opening formed in the bearing frame, and an upper blocking column and a lower blocking column are arranged on the inner cavity wall of the movable opening of the bearing frame up and down. 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subjects AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE
APPARATUS THEREFOR
BLASTING
CHEMISTRY
CRYSTAL GROWTH
DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS,IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KINDOF FURNACE
FURNACES
HEATING
KILNS
LIGHTING
MECHANICAL ENGINEERING
METALLURGY
OVENS
PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE
REFINING BY ZONE-MELTING OF MATERIAL
RETORTS
SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE
SINGLE-CRYSTAL-GROWTH
UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
WEAPONS
title Feeding frame for batch annealing of silicon carbide wafers and annealing furnace tube
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