Laser pulse cascade

An illumination module of a wafer inspection system includes: an illumination source providing ultraviolet illumination having a wavelength less than 300 nm; a pulse cascade optically coupled to an illumination source to receive ultraviolet illumination, where the pulse cascade comprises a chain of...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FELDMAN, HAIM, GOLBERG BORIS, NAFTALI, RON
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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