Chip and preparation method thereof

The invention relates to the technical field of semiconductor packaging, and provides a chip and a preparation method thereof.The chip comprises a substrate, a plurality of insulating layers and a plurality of rewiring layers; the plurality of insulating layers are laid on the substrate, the plurali...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: WANG SHIZHAO, LIU SHENG, CHEN ZHIWEN, PAN DAN, LYU TING, OUYANG YUHANG, HIGASHIYOSHI
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The invention relates to the technical field of semiconductor packaging, and provides a chip and a preparation method thereof.The chip comprises a substrate, a plurality of insulating layers and a plurality of rewiring layers; the plurality of insulating layers are laid on the substrate, the plurality of insulating layers are stacked in sequence, and each insulating layer is provided with a plurality of grooves, a plurality of limiting cavities and a plurality of micro-copper columns; the plurality of grooves are formed in one side, far away from the substrate, of the insulating layer; each limiting cavity is located on the side, close to the base plate, of the groove and communicates with the groove. The plurality of micro-copper columns and the plurality of grooves are arranged in a one-to-one correspondence manner, and each micro-copper column is filled in the corresponding groove and the corresponding limiting cavity; the multiple rewiring layers and the multiple insulating layers are arranged in a one-to