Anomaly detection based on aggregation statistics using neural networks

The disclosed embodiments describe a method and system to perform a method of obtaining a simplified representation of a plurality of sensor statistics representative of data collected by a plurality of sensors associated with a device manufacturing system that performs manufacturing operations. The...

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Bibliographische Detailangaben

Hauptverfasser:	ISKANDER JIMMY, ARMACOST MICHAEL D
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS COMPUTING CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING COUNTING ELECTRIC DIGITAL DATA PROCESSING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SEMICONDUCTOR DEVICES
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