Double-coil type oil detection sensor and manufacturing method thereof

The invention provides a double-coil type oil detection sensor and a manufacturing method thereof. The sensor comprises a chip main body and a sensing unit arranged on the chip main body, the chip main body comprises a detection micro-channel, and two openings are formed in the two ends of the detec...

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Bibliographische Detailangaben
Hauptverfasser: WANG CHENYONG, WANG RIWEI, ZHANG HONGPENG, HU SHUKUI, LI WEI, ZHANG SHUYAO, ZHANG ZUO, BAI CHENCHAO, WANG JIZHE
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention provides a double-coil type oil detection sensor and a manufacturing method thereof. The sensor comprises a chip main body and a sensing unit arranged on the chip main body, the chip main body comprises a detection micro-channel, and two openings are formed in the two ends of the detection micro-channel correspondingly and serve as an oil sample inlet and an oil sample outlet correspondingly; the sensing unit comprises a double-coil type oil detection sensor and an LC resonance unit, the double-coil type sensor comprises an excitation-receiving coil and a detection coil, the excitation-receiving coil is tightly attached to and oppositely connected to one side of the detection coil, and the other side of the detection coil is tightly attached to the side wall of the detection micro-channel; the LC resonance unit is formed by connecting a precision capacitor and a detection coil in series. The sensor disclosed by the invention adopts a coaxial double-coil structure, when metal abrasive particles p