EUV target material recovery device

A conduit structure for an EUV system is disclosed in which a non-horizontal interior surface of a conduit is provided with a flow barrier that prevents molten target material from flowing across the surface such that the molten target material freezes on and is captured by the interior surface. Where the conduit is a conduit through which droplets of target material flow out of the EUV chamber, a flow barrier on the side of the conduit ensures that molten target material initially captured by the upper surface of the conduit and flowing to the sidewall adheres to the sidewall and avoids the actual droplet path. This ensures that an opening in the conduit is maintained, allowing intended flow. The conduit structure may be placed between, for example, an interior of a chamber in which EUV radiation is generated and a target material container. 公开了一种用于EUV系统的导管结构，其中导管的非水平内部表面设置有流动障碍物，该流动障碍物阻止熔融目标材料跨表面流动，以使熔融目标材料冻结在内部表面上并且被内部表面捕获。在导管是目标材料微滴从EUV腔室流出所通过的导管的情况下，导管的侧面上的流动障碍物确保最初被导管的上部表面捕获并且流到侧壁的熔融目标材料粘附到侧壁并且避开实际微滴路径。