Inspection apparatus and inspection method
An inspection apparatus for inspecting a substrate according to the present invention comprises: a placement member on which a substrate can be placed; a holding unit that holds a probe card having a probe that is in contact with an electrode on the substrate; a moving mechanism that holds and moves...
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| creator | KONISHI, KENTAROU ENDO TOMOYA SAKAMOTO HIROAKI NUKANOBU TOMOKI SHIKAGAWA DAIKI |
| description | An inspection apparatus for inspecting a substrate according to the present invention comprises: a placement member on which a substrate can be placed; a holding unit that holds a probe card having a probe that is in contact with an electrode on the substrate; a moving mechanism that holds and moves the mounting member; an imaging unit having a first imaging unit for identifying the substrate mounted on the mounting member, and a second imaging unit for identifying the probe of the probe card held by the holding unit, the first imaging unit and the second imaging unit being fixed to a common housing; and an imaging movement mechanism for moving the housing of the imaging unit, the imaging movement mechanism being configured to move the housing of the imaging unit on the basis of imaging results of the first imaging unit and the second imaging unit in a state in which the mounting member on which the substrate is mounted is positioned below the probe card held by the holding unit. The substrate placed on the p |
| format | Patent |
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| language | chi ; eng |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | Inspection apparatus and inspection method |
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