Bottom edge ring and middle edge ring

A bottom ring is configured to support a movable edge ring. The edge ring is configured to be raised and lowered relative to the substrate support. The bottom ring includes: an upper surface, the upper surface being step-shaped; an annular inner diameter; an annular outer diameter; a lower surface;...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TOKAIRIN, SHAWN, E., S, RASNASINGHE, KIRAN, RAGITA, MCCHESNEY JON
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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