Disilane multi-stage rectification and purification device

The present invention discloses a disilane multistage rectification purification apparatus, and relates to the technical field of rectification equipment, the disilane multistage rectification purification apparatus comprises a reaction tower, a liquid collection cover, a liquid separation part, a p...

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Bibliographische Detailangaben
Hauptverfasser: GENG JINCHUN, LI GUANGFENG, WU XIHU, BAO YIXUAN, ZHENG ANXIONG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The present invention discloses a disilane multistage rectification purification apparatus, and relates to the technical field of rectification equipment, the disilane multistage rectification purification apparatus comprises a reaction tower, a liquid collection cover, a liquid separation part, a pressurization ring, a liquid adding part and a lifting part, the upper end of the disilane multistage rectification purification apparatus penetrates through the top of the reaction tower, the lower end of the lifting part is fixedly connected with the liquid separation part, and the disilane multistage rectification purification apparatus is used for adjusting the contact time of liquid and gas so as to control the product purity; the liquid separation part comprises an inner ring, an outer ring and an opening and closing plate, the inner ring and the outer ring are both of a hollow structure, the inner ring is communicated with the outer ring, the opening and closing plate is arranged at the bottoms of the inner