Annular gyroscope harmonic oscillator structure and manufacturing method thereof

The invention belongs to the technical field of vibrating gyroscopes, and particularly relates to an annular gyroscope harmonic oscillator structure and a manufacturing method thereof.The annular gyroscope harmonic oscillator structure comprises a substrate, an annular harmonic oscillator with the center bonded to the substrate and fixed electrode assemblies distributed inside and outside the annular harmonic oscillator in a surrounding mode; the fixed electrode assembly comprises an outer electrode group surrounding the vibration circular ring, the outer electrode group comprises a plurality of driving electrodes and detection electrodes which are arranged at intervals, and the distance between the driving electrodes and the vibration circular ring is larger than the distance between the detection electrodes and the vibration circular ring. According to the annular gyroscope harmonic oscillator structure driven and detected at unequal electrode intervals, the initial interval of the driving electrodes can be