Process for combining thin film and aluminum oxide ceramic substrate

The invention provides a process for combining a thin film and an aluminum oxide ceramic substrate, which belongs to the technical field of thick thin film combination and comprises the following steps: preparing a multilayer aluminum oxide ceramic substrate; carrying out grinding and polishing trea...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHANG HUIXIN, ZHANG HE, YANG ZHENTAO, REN HAODI, ZHANG QIAN, YU XIMENG, YU FEI, LIU LINJIE
Format: Patent
Sprache:chi ; eng
Schlagworte:
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