Rare earth alloy target material and preparation method and application thereof
The invention relates to the technical field of rare earth alloy, in particular to a rare earth alloy target material for electronic information and a preparation method and application thereof, the rare earth alloy target material comprises 10-80 at.% of rare earth element RE and 20-90 at.% of meta...
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| creator | LI SHUAN WANG ZHIQIANG PANG ZENGDONG YANG HONGBO ZHANG XIAOWEI WU DAOGAO XU MINGLEI WANG SHUANG ZHANG YANLING DONG RUIFENG CHENG JUN |
| description | The invention relates to the technical field of rare earth alloy, in particular to a rare earth alloy target material for electronic information and a preparation method and application thereof, the rare earth alloy target material comprises 10-80 at.% of rare earth element RE and 20-90 at.% of metal element M; the rare earth element RE comprises at least one of lanthanum, cerium, europium and ytterbium, and the metal element M comprises at least one of tungsten, rhenium and molybdenum. Lanthanum, cerium, europium and ytterbium all have special electromagnetic properties and thermal stability, tungsten, rhenium and molybdenum elements have high melting points, high strength and good thermal conductivity, the mechanical property and heat resistance of the target material can be enhanced, the high-purity target material is prepared according to the proportion of rare earth elements to metal elements and high-purity raw materials, the impurity content is reduced, and the target material is suitable for industria |
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the rare earth element RE comprises at least one of lanthanum, cerium, europium and ytterbium, and the metal element M comprises at least one of tungsten, rhenium and molybdenum. Lanthanum, cerium, europium and ytterbium all have special electromagnetic properties and thermal stability, tungsten, rhenium and molybdenum elements have high melting points, high strength and good thermal conductivity, the mechanical property and heat resistance of the target material can be enhanced, the high-purity target material is prepared according to the proportion of rare earth elements to metal elements and high-purity raw materials, the impurity content is reduced, and the target material is suitable for industria</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | ALLOYS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL FERROUS OR NON-FERROUS ALLOYS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TREATMENT OF ALLOYS OR NON-FERROUS METALS |
| title | Rare earth alloy target material and preparation method and application thereof |
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