Method for reducing mechanical coupling error of quartz sensing device
The invention relates to the technical field of quartz sensing device preparation, in particular to a method for reducing the mechanical coupling error of a quartz sensing device, which comprises the following steps: processing a Z-cut quartz wafer to form a plurality of quartz sensor chips to obtai...
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| creator | RUAN XIANGYU ZHONG YUANHUA XIONG FENG ZHAN CHAO LIAO XIANG |
| description | The invention relates to the technical field of quartz sensing device preparation, in particular to a method for reducing the mechanical coupling error of a quartz sensing device, which comprises the following steps: processing a Z-cut quartz wafer to form a plurality of quartz sensor chips to obtain a quartz sensor wafer, the side wall of each quartz sensor chip being provided with a crystal edge; coating the quartz sensor wafer to form a first metal film layer; forming a first photoresist on the surface of the first metal film layer; exposing the first photoresist of the crystal edge through a side exposure method; transferring the exposure pattern of the first photoresist to the first metal film layer to obtain an exposed crystal edge; exposed crystal edges are eliminated through a quartz wet chemical corrosion method. The method has the effects of accurately eliminating the crystal edge on the side wall of the quartz sensor chip through fixed-point positioning and reducing the mechanical coupling error of |
| format | Patent |
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| language | chi ; eng |
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| subjects | ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS MEASURING MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TARIFF METERING APPARATUS TESTING TRANSPORTING |
| title | Method for reducing mechanical coupling error of quartz sensing device |
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