Apparatus for supplying liquid target material to radiation source

The invention relates to an apparatus for supplying a liquid target material to a radiation source, comprising: a first reservoir; a pressurization system configured to pressurize the hydraulic fluid; and a separation device configured to separate the hydraulic fluid from the liquid target material...

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Bibliographische Detailangaben
Hauptverfasser: VAN DE VEN BASTIAAN LAMBERTUS WILHELMUS MARINUS, DIREKX DANIEL JOZEF MARIA, WESTERLAKEN JAN STEVEN CHRISTIAAN, JACOBS JOHANNES HENRICUS WILHELMUS, FEIJTS MARCELLINUS WILHELMUS LEONARDUS HUBERTUS, VAN DRENT WILLIAM PETER, KNAPEN BRYAN L, ROOVERS NICHOLAS J W, BUIS, ERIC, J
Format: Patent
Sprache:chi ; eng
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