Thin film sensor with zero strain

The invention discloses a thin film sensor with zero strain. The thin film sensor comprises a one-way measuring grid, a compensation grid and three bonding pads. The compensation grid comprises a transverse grid and a vertical grid which are connected in series; the three bonding pads comprise a com...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LEI YUZHE, REN LI, YAN ZHIPENG, LUO PINGHUA, ZHANG XUN, ZHAO HENG, LI WANHENG, ZHAO KAIFENG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a thin film sensor with zero strain. The thin film sensor comprises a one-way measuring grid, a compensation grid and three bonding pads. The compensation grid comprises a transverse grid and a vertical grid which are connected in series; the three bonding pads comprise a compensation gate bonding pad, a common bonding pad and a measurement gate bonding pad; the first end of the one-way measuring grid and the first end of the compensation grid are connected in series through the common bonding pad to form a half-bridge strain gauge, the measuring grid bonding pad is connected with the second end of the one-way measuring grid, and the compensation grid bonding pad is connected with the second end of the compensation grid. The one-way measuring grid, the common bonding pad and the measuring grid bonding pad form a measuring strain gauge; the vertical grid, the transverse grid, the common bonding pad and the compensation grid bonding pad form the compensation strain gauge, the zero strain