Overlay error measuring device and method

The invention provides an overlay error measuring device and method, and the device comprises an objective table, an objective lens, a first spectroscope, a first barrel lens, a TDI line scanning camera used for scanning and drawing, a second barrel lens, an area-array camera used for point-to-point...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HAN JINGSHAN, YANG FENG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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