Overlay error measuring device and method
The invention provides an overlay error measuring device and method, and the device comprises an objective table, an objective lens, a first spectroscope, a first barrel lens, a TDI line scanning camera used for scanning and drawing, a second barrel lens, an area-array camera used for point-to-point...
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| creator | HAN JINGSHAN YANG FENG |
| description | The invention provides an overlay error measuring device and method, and the device comprises an objective table, an objective lens, a first spectroscope, a first barrel lens, a TDI line scanning camera used for scanning and drawing, a second barrel lens, an area-array camera used for point-to-point measurement, a processor, and an objective table controller. The first spectroscope, the first barrel lens and the TDI line scanning camera are sequentially arranged along the optical axis of the objective lens, the first optical axis of the first spectroscope coincides with the optical axis of the objective lens, the second barrel lens and the area-array camera are sequentially arranged along the second optical axis of the first spectroscope, and the processor is connected with the TDI line scanning camera and the area-array camera and used for processing images and sending out control instructions. The objective table controller is connected with the objective table and the processor and used for controlling mov |
| format | Patent |
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| language | chi ; eng |
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| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS |
| title | Overlay error measuring device and method |
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