Calibration method for optical interference tomography apparatus

Calibration method for optical interference tomography apparatus

The present invention discloses a calibration method, which is a calibration method of an optical interference tomography apparatus, the optical interference tomography apparatus including: a light source that generates measurement light; a beam splitter that splits the measurement light into refere...

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Hauptverfasser: CHO MIN-SU, LEE WON-JUN, JUNG HYO-SANG
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Sprache:chi ; eng
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MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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creator CHO MIN-SU
LEE WON-JUN
JUNG HYO-SANG
description The present invention discloses a calibration method, which is a calibration method of an optical interference tomography apparatus, the optical interference tomography apparatus including: a light source that generates measurement light; a beam splitter that splits the measurement light into reference light and sample measurement light; a reference mirror that reflects the reference light to generate reference reflected light; a scanning section that reflects the sample measurement light to guide the sample measurement light; and a light detector which detects interference light formed by overlapping signal reflection light formed by reflection of the sample measurement light at the calibration target and reference reflection light so as to obtain surface and internal image signals of the calibration target, the calibration method includes: a step of scanning a calibration target with an optical interference tomography apparatus to obtain a three-dimensional image of a surface and an interior of the calibrat
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subjects MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
title Calibration method for optical interference tomography apparatus
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