Film box door opening device and semiconductor processing equipment

The invention provides a film magazine door opening device and semiconductor processing equipment, in the device, a mounting part is arranged on a first side of an isolation body and is used for opening or sealing a transmission port; a closed cavity is formed in the mounting part, the door opening...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YANG SHUAI, HUANG MINTAO, CHANG JIANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHECKS FOR WINGS DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FIXED CONSTRUCTIONS KEYS LOCKS SAFES SEMICONDUCTOR DEVICES WINDOW OR DOOR FITTINGS WING FITTINGS NOT OTHERWISE PROVIDED FOR, CONCERNED WITH THEFUNCTIONING OF THE WING
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