Film box door opening device and semiconductor processing equipment
The invention provides a film magazine door opening device and semiconductor processing equipment, in the device, a mounting part is arranged on a first side of an isolation body and is used for opening or sealing a transmission port; a closed cavity is formed in the mounting part, the door opening...
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| creator | YANG SHUAI HUANG MINTAO CHANG JIANG |
| description | The invention provides a film magazine door opening device and semiconductor processing equipment, in the device, a mounting part is arranged on a first side of an isolation body and is used for opening or sealing a transmission port; a closed cavity is formed in the mounting part, the door opening driving module is arranged in the cavity, and the door opening module is arranged on the side, facing the transmission port, outside the cavity; the connection sealing structure is arranged to penetrate through the mounting part, is connected with the door opening driving module and the door opening module and is used for driving the door opening module to move under the driving of the door opening driving module, and the door opening module is used for taking out the door plate of the film magazine from the initial position through the transmission port in the moving process and carrying the door plate back to the initial position; and the connecting and sealing structure is arranged to seal the through position o |
| format | Patent |
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a closed cavity is formed in the mounting part, the door opening driving module is arranged in the cavity, and the door opening module is arranged on the side, facing the transmission port, outside the cavity; the connection sealing structure is arranged to penetrate through the mounting part, is connected with the door opening driving module and the door opening module and is used for driving the door opening module to move under the driving of the door opening driving module, and the door opening module is used for taking out the door plate of the film magazine from the initial position through the transmission port in the moving process and carrying the door plate back to the initial position; and the connecting and sealing structure is arranged to seal the through position o</description><language>chi ; eng</language><subject>BASIC ELECTRIC ELEMENTS ; CHECKS FOR WINGS ; DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; 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| language | chi ; eng |
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| subjects | BASIC ELECTRIC ELEMENTS CHECKS FOR WINGS DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FIXED CONSTRUCTIONS KEYS LOCKS SAFES SEMICONDUCTOR DEVICES WINDOW OR DOOR FITTINGS WING FITTINGS NOT OTHERWISE PROVIDED FOR, CONCERNED WITH THEFUNCTIONING OF THE WING |
| title | Film box door opening device and semiconductor processing equipment |
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