Spin coating method and device and preparation method of thin film battery

The invention relates to a spin coating method and device and a preparation method of a thin film battery. The spin-coating method comprises the steps that a substrate to be spin-coated is integrally arranged in a manner of deviating from a rotation center, the substrate is obliquely arranged relati...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YU SONGKUN, HUANG QIANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ELECTRICITY PERFORMING OPERATIONS PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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