Strain gauge type pressure sensor with low temperature drift

The invention discloses a strain gauge type pressure sensor with low temperature drift, which comprises an outer shell, a support block and a sensitive element, and is characterized in that the sensitive element comprises a thin film substrate and a sensitive wire grid, and the thin film substrate i...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG SHUGANG, WEI SHUANG, LI QINLAN, ZHOU LIANQIAO, XU XINKAI, YANG JING, SU YEWANG, ZHANG CHUNKE
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a strain gauge type pressure sensor with low temperature drift, which comprises an outer shell, a support block and a sensitive element, and is characterized in that the sensitive element comprises a thin film substrate and a sensitive wire grid, and the thin film substrate is prepared from a material with low elastic modulus; the sensitive element is provided with a temperature compensation annular structure, an inner side annular arrangement wire grid structure and an outer side radial arrangement wire grid structure from the central area to the outside along one side of the thin film substrate. The temperature compensation annular structure is used for adjusting the temperature sensitivity coefficient of the sensor. Compared with a common strain gauge type pressure sensor, high pressure sensitivity and low temperature sensitivity coefficient can be achieved at the same time, and therefore the requirement for accurately measuring the pressure under the condition that the environment