Method and apparatus for gas flow control

An apparatus for controlling the flow rate of a gas includes a controllable valve in which the position of the valve and the pressure of the gas upstream of the valve are measured and used in combination with a first lookup table to determine the flow rate of the gas through the valve; and a flow re...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MONKOWSKI JOSEPH R, DING TAO, J.FRANKLIN, SHMAKOV ANDREY, OWENS TIM, CHENG JIUYI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CONTROLLING PHYSICS REGULATING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!