Pressure sensor, preparation method thereof and chip
The embodiment of the invention provides a pressure sensor, a preparation method thereof and a chip. The pressure sensor includes a measurement capacitance and a reference capacitance. The measuring capacitor comprises a first substrate and a second substrate which are stacked, and the first substra...
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| creator | LI YUE QU FENG SUN JIE DING DING GUO WEILONG WU SHAOHUA REN YANFEI CHANG WENBO DU GUOCHEN WEI QIUXU ZHANG TAONAN HE NANA WANG LIHUI |
| description | The embodiment of the invention provides a pressure sensor, a preparation method thereof and a chip. The pressure sensor includes a measurement capacitance and a reference capacitance. The measuring capacitor comprises a first substrate and a second substrate which are stacked, and the first substrate and the second substrate enclose to form a vacuum first chamber; one side, facing the first cavity, of the first substrate comprises a first measuring pole plate, one side, facing the first cavity, of the second substrate comprises a second measuring pole plate, and the capacitance of the measuring capacitor changes along with external air pressure; the reference capacitor comprises a third substrate and a fourth substrate which are stacked, and the third substrate and the fourth substrate enclose to form a second cavity; the side, facing the second cavity, of the third substrate comprises a first reference pole plate, the side, facing the second cavity, of the fourth substrate comprises a second reference pole |
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The pressure sensor includes a measurement capacitance and a reference capacitance. The measuring capacitor comprises a first substrate and a second substrate which are stacked, and the first substrate and the second substrate enclose to form a vacuum first chamber; one side, facing the first cavity, of the first substrate comprises a first measuring pole plate, one side, facing the first cavity, of the second substrate comprises a second measuring pole plate, and the capacitance of the measuring capacitor changes along with external air pressure; the reference capacitor comprises a third substrate and a fourth substrate which are stacked, and the third substrate and the fourth substrate enclose to form a second cavity; the side, facing the second cavity, of the third substrate comprises a first reference pole plate, the side, facing the second cavity, of the fourth substrate comprises a second reference pole</description><language>chi ; eng</language><subject>MEASURING ; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE ; PHYSICS ; TESTING</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240607&DB=EPODOC&CC=CN&NR=118150031A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240607&DB=EPODOC&CC=CN&NR=118150031A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>LI YUE</creatorcontrib><creatorcontrib>QU FENG</creatorcontrib><creatorcontrib>SUN JIE</creatorcontrib><creatorcontrib>DING DING</creatorcontrib><creatorcontrib>GUO WEILONG</creatorcontrib><creatorcontrib>WU SHAOHUA</creatorcontrib><creatorcontrib>REN YANFEI</creatorcontrib><creatorcontrib>CHANG WENBO</creatorcontrib><creatorcontrib>DU GUOCHEN</creatorcontrib><creatorcontrib>WEI QIUXU</creatorcontrib><creatorcontrib>ZHANG TAONAN</creatorcontrib><creatorcontrib>HE NANA</creatorcontrib><creatorcontrib>WANG LIHUI</creatorcontrib><title>Pressure sensor, preparation method thereof and chip</title><description>The embodiment of the invention provides a pressure sensor, a preparation method thereof and a chip. 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The pressure sensor includes a measurement capacitance and a reference capacitance. The measuring capacitor comprises a first substrate and a second substrate which are stacked, and the first substrate and the second substrate enclose to form a vacuum first chamber; one side, facing the first cavity, of the first substrate comprises a first measuring pole plate, one side, facing the first cavity, of the second substrate comprises a second measuring pole plate, and the capacitance of the measuring capacitor changes along with external air pressure; the reference capacitor comprises a third substrate and a fourth substrate which are stacked, and the third substrate and the fourth substrate enclose to form a second cavity; the side, facing the second cavity, of the third substrate comprises a first reference pole plate, the side, facing the second cavity, of the fourth substrate comprises a second reference pole</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING |
| title | Pressure sensor, preparation method thereof and chip |
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