Model-based controlled load gate suction scheme

A load gate is disclosed in which the suction speed is controlled to minimize the likelihood of coagulation. The loading gate communicates with the vacuum pump and the valve. A controller is used to control the valve such that a supersaturation ratio within the load gate does not exceed a predetermined threshold value that is less than or equal to a threshold value for vapor condensation. In particular embodiments, a computer model is used to generate a profile, and the valve is controlled according to the profile, which may be a suction velocity profile or a pressure profile. In another embodiment, the load gate includes a temperature sensor and a pressure sensor. The controller may calculate a supersaturation ratio based on the parameters and control the valve accordingly. 公开一种装载闸，其中抽吸速度受到控制，以使凝结的可能性最小化。装载闸与真空泵及阀连通。控制器用于控制阀，进而使得装载闸内的过饱和比不超过预定阈值，所述预定阈值小于或等于蒸气凝结的临界值。在特定实施例中，使用计算机模型来产生分布图，且根据所述分布图来控制阀，所述分布图可为抽吸速度分布图或压力分布图。在另一实施例中，装载闸包括温度传感器及压力传感器。控制器可基于这些参数来计算过饱和比，并相应地控制阀。