Composite film layer, photoetching method and system, LED chip and manufacturing method thereof

The invention provides a composite film layer, a photoetching method and system, an LED chip and a manufacturing method of the LED chip. According to the composite film layer, a patterned wavelength conversion part is arranged in a photoresist layer or on the surface of at least one side, and after...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LI MINHUA, CHEN KAIXUAN, ZHAO BIN, QU XIAODONG, CUI HENGPING, JIANG TUDUI, YANG KEWEI, TAN GUIYING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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