Layout pattern of static random access memory and forming method thereof

A layout pattern of a static random access memory (SRAM) includes at least a plurality of gate structures on a substrate and spanning the plurality of fin structures to form a plurality of transistors distributed on the substrate, the plurality of transistors including: two pull-up transistors (PUs)...

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Hauptverfasser: GUO YOUCE, HUANG LIPING, ZHANG ZIFENG, ZHANG JUNJIE, WANG SHURU, CHEN YUFANG, ZENG JUNYAN, HUANG JUNXIAN
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creator GUO YOUCE
HUANG LIPING
ZHANG ZIFENG
ZHANG JUNJIE
WANG SHURU
CHEN YUFANG
ZENG JUNYAN
HUANG JUNXIAN
description A layout pattern of a static random access memory (SRAM) includes at least a plurality of gate structures on a substrate and spanning the plurality of fin structures to form a plurality of transistors distributed on the substrate, the plurality of transistors including: two pull-up transistors (PUs) and two pull-down transistors (PDs) together forming a latch, and two access transistors (PGs) connected to the latch circuit, and in any one of the static random access memory cells, one of the PGs is connected to the latch circuit. The fin-shaped structure included in the pull-up transistor (PU) is defined as a pull-up transistor fin-shaped structure, the fin-shaped structure included in the pull-down transistor (PD) is defined as a pull-down transistor fin-shaped structure, and the fin-shaped structure included in the access transistor (PG) is defined as an access transistor fin-shaped structure. Wherein a width of the pull-down transistor fin structure is wider than a width of the access transistor fin structu
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Layout pattern of static random access memory and forming method thereof
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