Wafer insulation, voltage resistance and aging test device
The invention relates to the field of wafer chip processing equipment, in particular to a wafer insulation, voltage resistance and aging test device which comprises an operation table, a moving plate, a heating disc, a probe card, a test plate, a linear driving mechanism and a lifting mechanism. The...
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| creator | JIA SHILONG MAO SAIJUN |
| description | The invention relates to the field of wafer chip processing equipment, in particular to a wafer insulation, voltage resistance and aging test device which comprises an operation table, a moving plate, a heating disc, a probe card, a test plate, a linear driving mechanism and a lifting mechanism. The moving plate is slidably mounted at the top of the operating table, and the linear driving mechanism is mounted at the top of the operating table and used for driving the moving plate to slide in the length direction of the moving plate. A lifting plate is arranged at the top of the moving plate, and the lifting mechanism is mounted at the top of the operating table and used for driving the lifting plate to ascend and descend; the heating disc is mounted at the top of the lifting plate, the probe card is mounted at the top of the heating disc, and the test plate is located above the probe card; the top of the test board is provided with a nitrogen connector along the vertical direction, the top of the probe card i |
| format | Patent |
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| language | chi ; eng |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING |
| title | Wafer insulation, voltage resistance and aging test device |
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