Optical sensor based on bio-electricity signal and chemical signal and preparation method thereof
The invention discloses an optical sensor based on a bio-electricity signal and a chemical signal and a preparation method of the optical sensor. A photoelectric up-conversion device with an InGaP-based LED and a GaAs-based DJPD is grown on a gallium arsenide substrate through metal organic chemical...
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| creator | DING HE PENG YANXIU YANG JIAN SHENG XING WANG, YONGTIAN |
| description | The invention discloses an optical sensor based on a bio-electricity signal and a chemical signal and a preparation method of the optical sensor. A photoelectric up-conversion device with an InGaP-based LED and a GaAs-based DJPD is grown on a gallium arsenide substrate through metal organic chemical vapor deposition; stripping the photoelectric up-conversion device from the original substrate by using a transfer printing technology and transferring the photoelectric up-conversion device to a new substrate polyimide substrate; a pattern is formed on a PEDOT: PSS layer on a photoelectric up-conversion device by adopting an ultraviolet lithography and reactive ion etching process, the pattern is interconnected with anodes of an LED and a PD to form an OECT, and finally waterproof and insulated packaging is performed on an integrated device through an SU-8 3005 epoxy resin layer to obtain a heterogeneous integrated structure. By mixing and integrating inorganic and organic semiconductor materials, the integrated |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING |
| title | Optical sensor based on bio-electricity signal and chemical signal and preparation method thereof |
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