Super-large-size chemical vapor deposition furnace

The invention relates to an oversized chemical vapor deposition furnace which comprises a deposition furnace body, the deposition furnace body comprises an inner container and an outer cylinder, a cavity is formed between the inner container and the outer cylinder, a deposition chamber is formed in...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HUI ZHIHAO, LIU JIE, ZHAO SHANGJIE, CHUAI YANMING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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