High-temperature electrostatic chuck
The high-temperature electrostatic chuck comprises a heating coil assembly, an electrode adsorption assembly, a temperature measurement assembly, a ceramic base body, a heat insulation plate and a water cooling base, the ceramic base body, the heat insulation plate and the water cooling base are seq...
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| creator | WANG LU WANG SHUAI LIU RUIQIANG CHEN HUI LI JIN WANG XIAOGANG REN HANYU ZHAO GUANYUAN YU XIAO LI SHIHUI |
| description | The high-temperature electrostatic chuck comprises a heating coil assembly, an electrode adsorption assembly, a temperature measurement assembly, a ceramic base body, a heat insulation plate and a water cooling base, the ceramic base body, the heat insulation plate and the water cooling base are sequentially overlapped from top to bottom, and when the high-temperature electrostatic chuck is in a working state, the ceramic base body is in a vacuum environment, and the water cooling base is in a standard atmospheric pressure environment; a dielectric layer is arranged at the top of the ceramic substrate and is in contact with a bearing object; the electrode adsorption assembly, the heating coil assembly and the temperature measurement assembly are sequentially arranged in the ceramic substrate from top to bottom, and the electrode adsorption assembly is connected with a six-phase power supply in a standard atmospheric pressure environment so as to realize that the high-temperature electrostatic chuck generates |
| format | Patent |
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a dielectric layer is arranged at the top of the ceramic substrate and is in contact with a bearing object; the electrode adsorption assembly, the heating coil assembly and the temperature measurement assembly are sequentially arranged in the ceramic substrate from top to bottom, and the electrode adsorption assembly is connected with a six-phase power supply in a standard atmospheric pressure environment so as to realize that the high-temperature electrostatic chuck generates</description><language>chi ; eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240503&DB=EPODOC&CC=CN&NR=117976602A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76294</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240503&DB=EPODOC&CC=CN&NR=117976602A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>WANG LU</creatorcontrib><creatorcontrib>WANG SHUAI</creatorcontrib><creatorcontrib>LIU RUIQIANG</creatorcontrib><creatorcontrib>CHEN HUI</creatorcontrib><creatorcontrib>LI JIN</creatorcontrib><creatorcontrib>WANG XIAOGANG</creatorcontrib><creatorcontrib>REN HANYU</creatorcontrib><creatorcontrib>ZHAO GUANYUAN</creatorcontrib><creatorcontrib>YU XIAO</creatorcontrib><creatorcontrib>LI SHIHUI</creatorcontrib><title>High-temperature electrostatic chuck</title><description>The high-temperature electrostatic chuck comprises a heating coil assembly, an electrode adsorption assembly, a temperature measurement assembly, a ceramic base body, a heat insulation plate and a water cooling base, the ceramic base body, the heat insulation plate and the water cooling base are sequentially overlapped from top to bottom, and when the high-temperature electrostatic chuck is in a working state, the ceramic base body is in a vacuum environment, and the water cooling base is in a standard atmospheric pressure environment; 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a dielectric layer is arranged at the top of the ceramic substrate and is in contact with a bearing object; the electrode adsorption assembly, the heating coil assembly and the temperature measurement assembly are sequentially arranged in the ceramic substrate from top to bottom, and the electrode adsorption assembly is connected with a six-phase power supply in a standard atmospheric pressure environment so as to realize that the high-temperature electrostatic chuck generates</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | High-temperature electrostatic chuck |
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