Linear displacement measuring device and method based on Young's double-slit interference fringes

The invention provides a linear displacement measuring device and method based on Young's double-slit interference fringes. The linear displacement measuring device comprises a double-slit diaphragm, a linear array camera, a displacement measuring sliding platform, a light source and an image p...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHI SHOUJIANG, ZHONG SHUNCONG, CHEN YULONG, LU FEIHONG, LIU DONGMING, FENG BIN, ZHONG JIANFENG
Format: Patent
Sprache:chi ; eng
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