Display substrate, manufacturing method thereof and display device

The invention relates to a display substrate, a manufacturing method thereof and a display device. The display substrate comprises a circuit substrate; the first electrode is arranged on the circuit substrate; at least three light-emitting chips with different epitaxial thicknesses, wherein the second electrode of each light-emitting chip is bonded with the corresponding first electrode; the sum of the thicknesses of the second electrodes and the corresponding first electrodes compensates for the epitaxial thickness difference between the light-emitting chips, so that the faces, away from the circuit substrate, of the light-emitting chips on the circuit substrate are located on the same plane. The display substrate comprises a circuit substrate and a guide layer arranged on the circuit substrate, the guide layer comprises a guide surface for guiding the position of the light-emitting chip to enable the second electrode of the light-emitting chip to be aligned with the corresponding first electrode, the probab