Resonator and filter
The invention provides a resonator and a filter. The resonator comprises a substrate, a lower electrode located on one side of the substrate, an acoustic mirror located between the substrate and the lower electrode, an upper electrode located on the side, away from the substrate, of the lower electr...
Gespeichert in:
| Hauptverfasser: | , , , , , |
|---|---|
| Format: | Patent |
| Sprache: | chi ; eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | ZHENG ZHIQIANG JIANG XINGYONG HAO LONG HUANG YUANQING ZHANG WEI ZHANG LANYUE |
| description | The invention provides a resonator and a filter. The resonator comprises a substrate, a lower electrode located on one side of the substrate, an acoustic mirror located between the substrate and the lower electrode, an upper electrode located on the side, away from the substrate, of the lower electrode, and a piezoelectric layer located between the upper electrode and the lower electrode. Wherein at least one of the upper electrode and the lower electrode is a multi-layer composite electrode, the multi-layer composite electrode comprises a first sub-electrode layer and a second sub-electrode layer which are stacked, the resistivity of the material of the second sub-electrode layer is smaller than that of the material of the first sub-electrode layer, and the thickness ratio of the second sub-electrode layer in the electrode is 20%-100%. By adopting the scheme of the invention, the Q value of the resonator can be increased, so that the performance of the resonator is improved.
本申请提供一种谐振器及滤波器。其中，谐振器包括衬底、位于衬底一侧的 |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_CN117938111A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>CN117938111A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_CN117938111A3</originalsourceid><addsrcrecordid>eNrjZBAJSi3Oz0ssyS9SSMxLUUjLzClJLeJhYE1LzClO5YXS3AyKbq4hzh66qQX58anFBYnJqXmpJfHOfoaG5pbGFoaGho7GxKgBAEfiILE</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Resonator and filter</title><source>esp@cenet</source><creator>ZHENG ZHIQIANG ; JIANG XINGYONG ; HAO LONG ; HUANG YUANQING ; ZHANG WEI ; ZHANG LANYUE</creator><creatorcontrib>ZHENG ZHIQIANG ; JIANG XINGYONG ; HAO LONG ; HUANG YUANQING ; ZHANG WEI ; ZHANG LANYUE</creatorcontrib><description>The invention provides a resonator and a filter. The resonator comprises a substrate, a lower electrode located on one side of the substrate, an acoustic mirror located between the substrate and the lower electrode, an upper electrode located on the side, away from the substrate, of the lower electrode, and a piezoelectric layer located between the upper electrode and the lower electrode. Wherein at least one of the upper electrode and the lower electrode is a multi-layer composite electrode, the multi-layer composite electrode comprises a first sub-electrode layer and a second sub-electrode layer which are stacked, the resistivity of the material of the second sub-electrode layer is smaller than that of the material of the first sub-electrode layer, and the thickness ratio of the second sub-electrode layer in the electrode is 20%-100%. By adopting the scheme of the invention, the Q value of the resonator can be increased, so that the performance of the resonator is improved.
本申请提供一种谐振器及滤波器。其中，谐振器包括衬底、位于衬底一侧的</description><language>chi ; eng</language><subject>BASIC ELECTRONIC CIRCUITRY ; ELECTRICITY ; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS ; RESONATORS</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240426&DB=EPODOC&CC=CN&NR=117938111A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240426&DB=EPODOC&CC=CN&NR=117938111A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>ZHENG ZHIQIANG</creatorcontrib><creatorcontrib>JIANG XINGYONG</creatorcontrib><creatorcontrib>HAO LONG</creatorcontrib><creatorcontrib>HUANG YUANQING</creatorcontrib><creatorcontrib>ZHANG WEI</creatorcontrib><creatorcontrib>ZHANG LANYUE</creatorcontrib><title>Resonator and filter</title><description>The invention provides a resonator and a filter. The resonator comprises a substrate, a lower electrode located on one side of the substrate, an acoustic mirror located between the substrate and the lower electrode, an upper electrode located on the side, away from the substrate, of the lower electrode, and a piezoelectric layer located between the upper electrode and the lower electrode. Wherein at least one of the upper electrode and the lower electrode is a multi-layer composite electrode, the multi-layer composite electrode comprises a first sub-electrode layer and a second sub-electrode layer which are stacked, the resistivity of the material of the second sub-electrode layer is smaller than that of the material of the first sub-electrode layer, and the thickness ratio of the second sub-electrode layer in the electrode is 20%-100%. By adopting the scheme of the invention, the Q value of the resonator can be increased, so that the performance of the resonator is improved.
本申请提供一种谐振器及滤波器。其中，谐振器包括衬底、位于衬底一侧的</description><subject>BASIC ELECTRONIC CIRCUITRY</subject><subject>ELECTRICITY</subject><subject>IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS</subject><subject>RESONATORS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2024</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZBAJSi3Oz0ssyS9SSMxLUUjLzClJLeJhYE1LzClO5YXS3AyKbq4hzh66qQX58anFBYnJqXmpJfHOfoaG5pbGFoaGho7GxKgBAEfiILE</recordid><startdate>20240426</startdate><enddate>20240426</enddate><creator>ZHENG ZHIQIANG</creator><creator>JIANG XINGYONG</creator><creator>HAO LONG</creator><creator>HUANG YUANQING</creator><creator>ZHANG WEI</creator><creator>ZHANG LANYUE</creator><scope>EVB</scope></search><sort><creationdate>20240426</creationdate><title>Resonator and filter</title><author>ZHENG ZHIQIANG ; JIANG XINGYONG ; HAO LONG ; HUANG YUANQING ; ZHANG WEI ; ZHANG LANYUE</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN117938111A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2024</creationdate><topic>BASIC ELECTRONIC CIRCUITRY</topic><topic>ELECTRICITY</topic><topic>IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS</topic><topic>RESONATORS</topic><toplevel>online_resources</toplevel><creatorcontrib>ZHENG ZHIQIANG</creatorcontrib><creatorcontrib>JIANG XINGYONG</creatorcontrib><creatorcontrib>HAO LONG</creatorcontrib><creatorcontrib>HUANG YUANQING</creatorcontrib><creatorcontrib>ZHANG WEI</creatorcontrib><creatorcontrib>ZHANG LANYUE</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>ZHENG ZHIQIANG</au><au>JIANG XINGYONG</au><au>HAO LONG</au><au>HUANG YUANQING</au><au>ZHANG WEI</au><au>ZHANG LANYUE</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Resonator and filter</title><date>2024-04-26</date><risdate>2024</risdate><abstract>The invention provides a resonator and a filter. The resonator comprises a substrate, a lower electrode located on one side of the substrate, an acoustic mirror located between the substrate and the lower electrode, an upper electrode located on the side, away from the substrate, of the lower electrode, and a piezoelectric layer located between the upper electrode and the lower electrode. Wherein at least one of the upper electrode and the lower electrode is a multi-layer composite electrode, the multi-layer composite electrode comprises a first sub-electrode layer and a second sub-electrode layer which are stacked, the resistivity of the material of the second sub-electrode layer is smaller than that of the material of the first sub-electrode layer, and the thickness ratio of the second sub-electrode layer in the electrode is 20%-100%. By adopting the scheme of the invention, the Q value of the resonator can be increased, so that the performance of the resonator is improved.
本申请提供一种谐振器及滤波器。其中，谐振器包括衬底、位于衬底一侧的</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | chi ; eng |
| recordid | cdi_epo_espacenet_CN117938111A |
| source | esp@cenet |
| subjects | BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS |
| title | Resonator and filter |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-28T12%3A04%3A05IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=ZHENG%20ZHIQIANG&rft.date=2024-04-26&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ECN117938111A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |