Tungsten filament probe distance adjusting method and system based on optical lever device

The invention discloses a tungsten filament probe distance adjusting method and system based on an optical lever device. The tungsten filament probe is controlled to move in the direction close to the alloy surface, and a first image is collected under the condition that the tungsten filament probe...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SUN YANBIN, LIU JIE, REN XIANGLONG, ZHANG HAO, WANG YU, QI JIANTAO, LIU RUFEI, LI QIANG, WANG JIALEI, HAO LINBO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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