Tungsten filament probe distance adjusting method and system based on optical lever device
The invention discloses a tungsten filament probe distance adjusting method and system based on an optical lever device. The tungsten filament probe is controlled to move in the direction close to the alloy surface, and a first image is collected under the condition that the tungsten filament probe...
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| creator | SUN YANBIN LIU JIE REN XIANGLONG ZHANG HAO WANG YU QI JIANTAO LIU RUFEI LI QIANG WANG JIALEI HAO LINBO |
| description | The invention discloses a tungsten filament probe distance adjusting method and system based on an optical lever device. The tungsten filament probe is controlled to move in the direction close to the alloy surface, and a first image is collected under the condition that the tungsten filament probe is observed through the camera; starting the optical lever device, controlling the tungsten filament probe to move towards the alloy surface, determining a first displacement variation of the tungsten filament probe based on the optical lever device, and acquiring a second image by using the camera; the corresponding relation between the first position variation and the first displacement variation of the tungsten filament probe in the first image and the second image is determined; determining a first displacement distance between the tungsten filament probe and the alloy surface based on the corresponding relation and a first position distance between the tungsten filament probe and the alloy surface in the secon |
| format | Patent |
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| language | chi ; eng |
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| subjects | APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING |
| title | Tungsten filament probe distance adjusting method and system based on optical lever device |
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