Coating equipment and coating method
The invention discloses coating equipment and a coating method, and belongs to the field of coating equipment and a coating method.The coating equipment comprises an equipment body and a conveying mechanism, and a feeding and discharging cavity, a first coating cavity, a second coating cavity, a thi...
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| creator | CHEN QILIN TAN XIAOHUA GE GUANGXING SU CHAOYING LI GUOQING CHEN HOUMO MAN XIAOHUA WANG YINGBIN |
| description | The invention discloses coating equipment and a coating method, and belongs to the field of coating equipment and a coating method.The coating equipment comprises an equipment body and a conveying mechanism, and a feeding and discharging cavity, a first coating cavity, a second coating cavity, a third coating cavity, a fourth coating cavity and a fifth coating cavity which communicate with one another are formed in the equipment body; evaporation coating can be carried out in the first coating cavity, RF sputtering coating can be carried out in the second coating cavity, RPD coating can be carried out in the third coating cavity, pulse direct-current sputtering coating can be carried out in the fourth coating cavity, direct-current sputtering coating can be carried out in the fifth coating cavity, and the conveying mechanism is installed in the equipment body. And the conveying mechanism is used for conveying the substrate to circulate among the chambers. Various vacuum coating technologies such as RPD, multi |
| format | Patent |
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| language | chi ; eng |
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| subjects | BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Coating equipment and coating method |
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