Chamber assembly, air inlet device and substrate processing equipment

The invention provides a cavity assembly. The cavity assembly comprises an annular lining assembly and an air inlet inserting piece. The bushing assembly comprises an upper bushing and a lower bushing; a plurality of layers of first air inlet structures are arranged on one side of the lower bush, ea...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PANG YUNLING, LIU ZHUHAN, JIANG YONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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