Semiconductor laser self-mixing interference dual-channel displacement measuring device and method
The invention discloses a semiconductor laser self-mixing interference dual-channel displacement measurement device which comprises a semiconductor laser, a lens light splitting unit, a first target reflector, a second target reflector, a signal processing circuit and a data acquisition and processi...
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| creator | LIAN TIANHONG WANG CUO KOU KE FAN YUZHEN |
| description | The invention discloses a semiconductor laser self-mixing interference dual-channel displacement measurement device which comprises a semiconductor laser, a lens light splitting unit, a first target reflector, a second target reflector, a signal processing circuit and a data acquisition and processing unit. The device further comprises a temperature controller, a driver and a signal generator. The temperature controller and the driver are connected with the semiconductor laser; the driver is also connected with the signal generator; and the semiconductor laser and the data acquisition and processing unit are connected with the signal processing circuit. The device solves the problems that the existing domestic dual-channel measurement structure is complex and can only be applied to the occasion where the motion frequencies of two target objects differ greatly, the detection efficiency is improved, and repeated secondary measurement is avoided. The invention also discloses a semiconductor laser self-mixing int |
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| subjects | MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING |
| title | Semiconductor laser self-mixing interference dual-channel displacement measuring device and method |
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