Full-automatic degumming stripping machine

The invention discloses a full-automatic degumming stripping machine which comprises a degumming cavity and a degumming working space provided with a degumming cavity shell and inside, the degumming cavity shell comprises a cavity bottom plate and a plurality of cavity side plates, and the degumming...

Ausführliche Beschreibung

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Hauptverfasser: ZHOU PENG, SHEN YUNQING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a full-automatic degumming stripping machine which comprises a degumming cavity and a degumming working space provided with a degumming cavity shell and inside, the degumming cavity shell comprises a cavity bottom plate and a plurality of cavity side plates, and the degumming cavity comprises a high-pressure nozzle moving part and a wafer mounting assembly. The high-pressure nozzle moving part and the wafer mounting assembly are located in the photoresist removing working space, and the high-pressure nozzle moving part and the wafer mounting assembly further comprise a settling pond used for settling and separating photoresist removing liquid; the wafer supply device is used for conveying wafers to the photoresist removing cavity; a third-stage filtering device; the soaking assembly is used for soaking the wafer; the heating assembly is used for heating the photoresist removing liquid; and the degumming liquid pressurizing assembly is connected with the heating device and is used for p