Liquid ejecting apparatus, method for controlling liquid ejecting apparatus, substrate processing apparatus, and article manufacturing method

Liquid ejecting apparatus, method for controlling liquid ejecting apparatus, substrate processing apparatus, and article manufacturing method

The invention provides a liquid ejecting apparatus, a control method thereof, a substrate processing apparatus, and an article manufacturing method, and provides a technology facilitating reduction of liquid consumption when a surface provided with a liquid ejecting port is cleaned. The liquid eject...

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Hauptverfasser: YAMAMOTO TETSUYA, KURI MASAHIRO
Format: Patent
Sprache:chi ; eng
Schlagworte:
CORRECTION OF TYPOGRAPHICAL ERRORS
i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME
LINING MACHINES
PERFORMING OPERATIONS
PRINTING
SELECTIVE PRINTING MECHANISMS
STAMPS
TRANSPORTING
TYPEWRITERS
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creator YAMAMOTO TETSUYA
KURI MASAHIRO
description The invention provides a liquid ejecting apparatus, a control method thereof, a substrate processing apparatus, and an article manufacturing method, and provides a technology facilitating reduction of liquid consumption when a surface provided with a liquid ejecting port is cleaned. The liquid ejecting apparatus includes: an ejection head having a surface provided with an ejection port for ejecting a liquid, a reservoir portion for storing the liquid, and a flow path communicating from the ejection port to the reservoir portion; a control unit that controls the pressure in the storage unit; and a cleaning unit that cleans the surface by sucking the liquid adhering to the surface from the suction port while moving the suction port along the surface. The control part controls the pressure in the storage part based on a first force acting on the liquid in the flow path due to the suction force of the suction port in the cleaning process so as to maintain the position of the liquid surface formed in the flow path
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subjects CORRECTION OF TYPOGRAPHICAL ERRORS
i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME
LINING MACHINES
PERFORMING OPERATIONS
PRINTING
SELECTIVE PRINTING MECHANISMS
STAMPS
TRANSPORTING
TYPEWRITERS
title Liquid ejecting apparatus, method for controlling liquid ejecting apparatus, substrate processing apparatus, and article manufacturing method
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