Preparation method of embedded resistor thin film material grown by magnetron sputtering

The invention relates to a preparation method of an embedded resistor thin-film material grown by magnetron sputtering, the surface area of a substrate can be reduced and the electrical performance can be improved by embedding a resistor into the substrate, the resistor with stable property is neede...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	XU YONGBING, LI NIANGUANG, YAN YU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRICITY RESISTORS
Online-Zugang:	Volltext bestellen
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