Process gas supply module for reflow soldering and reflow soldering equipment

The invention provides a process gas supply module for reflow soldering and reflow soldering equipment. The module comprises a container, a mass flow meter, a pressure controller, a first electromagnetic valve and a second electromagnetic valve, the container is used for containing liquid raw materi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG CHANGFEI, HUANG ZHANCHAO, SONG TAO, SHI TING, LI LAIBIN, ZHANG XINGGANG
Format: Patent
Sprache:chi ; eng
Schlagworte:
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